Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/21/2011
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Application #:
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10576105
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Filing Dt:
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04/30/2007
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Publication #:
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Pub Dt:
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03/24/2011
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Inventor:
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Peter Choi
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Title:
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PLASMA SOURCE OF DIRECTED BEAMS AND APPLICATION THEREOF TO MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16, AVENUE DE QUEBEC |
| PARC D'AFFAIRES SILIC DE VILLEBON COURTABOEUF |
| F-91140 VILLEBON SUR YVETTE, FRANCE |
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| NICK C. KOTTIS |
| PAULEY PETERSEN & ERICKSON |
| 2800 WEST HIGGINS ROAD |
| SUITE 365 |
| HOFFMAN ESTATES, IL 60169 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16, AVENUE DE QUEBEC |
| F-91140 VILLEBON SUR YVETTE, FRANCE |
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| NICK C. KOTTIS |
| PAULEY PETERSEN & ERICKSON |
| 2800 WEST HIGGINS ROAD |
| SUTIE 365 |
| HOFFMAN ESTATES, IL 60169 |
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