Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/28/2011
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Application #:
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12508381
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Filing Dt:
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07/23/2009
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Publication #:
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Pub Dt:
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04/22/2010
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Inventors:
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Zhong Qiang Hua, Sanjay Kamath, Young S. Lee, Sudhir R. Gondhalekar, Ellie Y. Yieh et al
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Title:
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REMOTE PLASMA CLEAN PROCESS WITH CYCLED HIGH AND LOW PRESSURE CLEAN STEPS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CALIFORNIA 95052 |
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| ROBERT W. MULCAHY |
| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CA 95052 |
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