Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/28/2011
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Application #:
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12329189
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Filing Dt:
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12/05/2008
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Publication #:
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Pub Dt:
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07/09/2009
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Inventors:
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Seok Han, Young-Hoon Kim, Hyo-Sun Kim
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Title:
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METHOD OF FORMING A PATTERN USING A PHOTORESIST COMPOSITION FOR IMMERSION LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG |
| YEONGTONG-GU, SUWON-SI |
| GYEONGGI-DO, KOREA, REPUBLIC OF |
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| MYERS BIGEL SIBLEY & SAJOVEC |
| PO BOX 37428 |
| RALEIGH, NC 27627 |
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