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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
08/09/2011
Application #:
11634924
Filing Dt:
12/07/2006
Publication #:
Pub Dt:
06/12/2008
Inventors:
Harry Sewell, Louis Markoya, Diane McCafferty
Title:
SYSTEMS AND METHODS FOR THERMALLY-INDUCED ABERRATION CORRECTION IN IMMERSION LITHOGRAPHY
Assignment: 1
Reel/Frame:
018735/0600Recorded: 12/07/2006Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/21/2006
Exec Dt:
11/27/2006
Exec Dt:
11/20/2006
Assignee:
DE RUN 6501
NL - 5504 DR VELDHOVEN, NETHERLANDS
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX ET AL
C/O MICHAEL D. SPECHT
1100 NEW YORK AVENUE, N.W.
WASHINGTON, D.C. 20005-3934
Assignment: 2
Reel/Frame:
019861/0890Recorded: 09/21/2007Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/03/2007
Exec Dt:
07/03/2007
Exec Dt:
07/03/2007
Assignee:
DE RUN 6501
NL - 5504 DR, VELDHOVEN, NETHERLANDS
Correspondent:
STERNE KESSLER GOLDSTEIN & FOX, P.L.L.C.
C/O MICHAEL D. SPECHT
1100 NEW YORK AVENUE, NW
WASHINGTON, DC 20005

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