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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
8002899
Issue Dt:
08/23/2011
Application #:
12242472
Filing Dt:
09/30/2008
Publication #:
20100078039
Pub Dt:
04/01/2010
Inventors:
Banqiu Wu, Richard Lee, M. Rao Yalamanchili, Ajay Kumar, James S. Papanu, Chung-Huan Jeon
Title:
METHOD AND APPARATUS FOR MASK PELLICLE ADHESIVE RESIDUE CLEANING
Assignment: 1
Reel/Frame:
021726/0078Recorded: 10/22/2008Pages: 16
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE APPLICATION NUMBER PREVIOUSLY RECORDED ON REEL 021611 FRAME 0796. ASSIGNOR(S) HEREBY CONFIRMS THE 11242472.
Assignors:
WU, BANQIU
Exec Dt:
09/16/2008
LEE, RICHARD
Exec Dt:
09/19/2008
YALAMANCHILI, M.RAO
Exec Dt:
09/19/2008
KUMAR, AJAY
Exec Dt:
09/22/2008
PAPANU, JAMES S.
Exec Dt:
09/18/2008
JEON, CHUNG-HUAN
Exec Dt:
09/19/2008
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CALIFORNIA 95052
Correspondent:
ROBERT W. MULCAHY
P.O. BOX 450A
LEGAL AFFAIRS DEPT.
SANTA CLARA, CA 95052

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