Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/30/2011
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Application #:
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12627602
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Filing Dt:
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11/30/2009
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Publication #:
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Pub Dt:
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05/06/2010
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Inventors:
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Kenji MATSUMOTO, Shigetoshi HOSAKA, Junichi KOIKE, Koji NEISHI
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR MANUFACTURING APPARATUS AND STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| 1-1, KATAHIRA 2-CHOME, AOBA-KU |
| SENDAI-SHI, MIYAGI, JAPAN 980-8577 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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