Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/13/2011
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Application #:
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11922502
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Filing Dt:
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12/19/2007
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Publication #:
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Pub Dt:
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04/23/2009
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Inventors:
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Koukichi Hiroshiro, Yuji Kamikawa, Takayuki Toshima, Naoki Shindo
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Title:
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SUBSTRATE PROCESSING APPARATUS INCLUDING A DRYING MECHANISM USING A FLUID MIXTURE OF PURIFIED WATER AND A VOLATILE ORGANIC SOLVENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| MICHAEL A. MAKUCH |
| SMITH GAMBRELL & RUSSELL, LLP |
| 1130 CONNECTICUT AVENUE |
| SUITE 1130 |
| WASHINGTON, DC 20036 |
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