Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/20/2011
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Application #:
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11868045
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Filing Dt:
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10/05/2007
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Publication #:
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Pub Dt:
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04/10/2008
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Inventors:
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Isamu SAKURAGI, Kazuhiro Kubota
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Title:
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METHOD FOR DETECTING AN END POINT OF RESIST PEELING, METHOD AND APPARATUS FOR PEELING RESIST, AND COMPUTER-READABLE STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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