Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/25/2011
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Application #:
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12167781
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Filing Dt:
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07/03/2008
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Publication #:
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Pub Dt:
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01/08/2009
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Inventors:
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Jong-Won Lee, Sang-Yeob Han, Chang-Ki Hong, Jae-Dong Lee
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Title:
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SLURRY COMPOSITIONS FOR SELECTIVELY POLISHING SILICON NITRIDE RELATIVE TO SILICON OXIDE, METHODS OF POLISHING A SILICON NITRIDE LAYER AND METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416, MAETAN-DONG |
| YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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| FRANK CHAU |
| 130 WOODBURY ROAD |
| WOODBURY, NY 11797 |
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