Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/01/2011
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Application #:
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12369306
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Filing Dt:
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02/11/2009
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Publication #:
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Pub Dt:
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09/17/2009
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Inventor:
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Kazuya GOTO
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Title:
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METHOD OF SUPPRESSING BEAM POSITION DRIFT, METHOD OF SUPPRESSING BEAM DIMENSION DRIFT, AND CHARGED-PARTICLE BEAM LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-2, MUSASHINO 3-CHOME, AKISHIMA |
| TOKYO, JAPAN 196-8558 |
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| THE WEBB LAW FIRM |
| 700 KOPPERS BUILDING |
| 436 SEVENTH AVENUE |
| PITTSBURGH, PA 15219 |
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