Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/22/2011
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Application #:
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11547085
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Filing Dt:
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12/07/2007
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Publication #:
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Pub Dt:
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08/21/2008
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Inventors:
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Aurelian Dodoc, Wilhelm Ulrich, Dieter Bader, Alexander Epple
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Title:
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PROJECTION OBJECTIVE, PROJECTION EXPOSURE APPARATUS AND REFLECTIVE RETICLE FOR MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMAN DEMOCRATIC REPUBLIC 73447 |
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| GEORGE F. LEHNIGK |
| 2100 PENNSYLVANIA AVE NW |
| SUITE 600 |
| WASHINGTON, DC 20037 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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