Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/29/2011
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Application #:
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10898113
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Filing Dt:
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07/22/2004
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Publication #:
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Pub Dt:
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02/17/2005
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Inventors:
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Jennifer Y. Sun, Senh Thach, Jim Dempster, Li Xu
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Title:
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CLEAN, DENSE YTTRIUM OXIDE COATING PROTECTING SEMICONDUCTOR PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| PATENT COUNSEL |
| APPLIED MATERIALS, INC. |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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