Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/13/2011
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Application #:
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12548066
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Filing Dt:
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08/26/2009
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Publication #:
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Pub Dt:
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03/04/2010
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Inventors:
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Shinya Morita, Koichi Sada, Takayuki Nakada, Tomoyuki Matsuda
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1 SOTOKANDA 4-CHOME, |
| CHIYODA-KU, TOKYO, JAPAN 1018980 |
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| BRUNDIDGE & STANGER, P.C. |
| 1700 DIAGONAL ROAD, SUITE 330 |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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