Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/27/2011
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Application #:
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12189883
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Filing Dt:
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08/12/2008
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Publication #:
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Pub Dt:
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08/27/2009
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Inventors:
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Hiroshige Uchida, Daisuke Shiraishi, Shoji Ikuhara, Akira Kagoshima
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Title:
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ETCHING ENDPOINT DETERMINATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-24-14, NISHI SHINBASHI, MINATO-KU, |
| TOKYO, JAPAN 105-8717 |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209-3873 |
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