Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/03/2012
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Application #:
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12039047
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Filing Dt:
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02/28/2008
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Publication #:
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Pub Dt:
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09/25/2008
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Inventors:
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Andreas Birkner, Michael Hofmann, Wolfgang Vollrath
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Title:
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DEVICE AND METHOD FOR EVALUATING DEFECTS IN THE EDGE AREA OF A WAFER AND USE OF THE DEVICE IN INSPECTION SYSTEM FOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KUBACHER WEG 4 |
| WEILBURG, GERMANY 35781 |
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| MARIA M. ELISEEVA |
| HOUSTON ELISEEVA LLP |
| 4 MILITIA DRIVE, SUITE 4 |
| LEXINGTON, MA 02421 |
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