Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/06/2012
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Application #:
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11128930
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Filing Dt:
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05/12/2005
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Inventors:
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David Cheung, Kirk J. Ostrowski
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Title:
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PLASMA BASED PHOTORESIST REMOVAL SYSTEM FOR CLEANING POST ASH RESIDUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| DELIO & PETERSON, LLC |
| 121 WHITNEY AVENUE |
| NEW HAVEN, CT 06510-1241 |
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