Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/13/2012
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Application #:
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12938918
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Filing Dt:
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11/03/2010
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Inventor:
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Theo Panagopoulos
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Title:
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RAPID AND UNIFORM GAS SWITCHING FOR A PLASMA ETCH PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BUCHANAN, INGERSOLL & ROONEY PC |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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