Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/13/2012
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Application #:
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12251343
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Filing Dt:
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10/14/2008
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Publication #:
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Pub Dt:
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04/15/2010
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Inventors:
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Hiroshi Shinriki, Kunitoshi Namba, Daekyun Jeong
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Title:
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METHOD FOR FORMING METAL FILM BY ALD USING BETA-DIKETONE METAL COMPLEX
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6-CHOME, NAGAYAMA |
| TAMA-SHI, TOKYO, 206-0025, JAPAN |
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| KNOBBE, MARTENS, OLSON & BEAR, LLP |
| 2040 MAIN STREET, 14TH FLOOR |
| IRVINE, CA 92614 |
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