Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/13/2012
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Application #:
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12362268
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Filing Dt:
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01/29/2009
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Publication #:
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Pub Dt:
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07/30/2009
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Inventors:
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Sam X. Sun, Hao Xu, Tony D. Flaim
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Title:
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ON-TRACK PROCESS FOR PATTERNING HARDMASK BY MULTIPLE DARK FIELD EXPOSURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2401 BREWER DRIVE |
| ROLLA, MISSOURI 65401 |
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| HOVEY WILLIAMS LLP |
| 10801 MASTIN BLVD., SUITE 1000 |
| OVERLAND PARK, KS 66210 |
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