Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/03/2012
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Application #:
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11958086
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Filing Dt:
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12/17/2007
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Publication #:
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Pub Dt:
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06/18/2009
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Inventors:
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Siddharth Chauhan, Kevin R. Lensing, James Broc Stirton
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Title:
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METHOD AND APPARATUS FOR EXTRACTING DOSE AND FOCUS FROM CRITICAL DIMENSION DATA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 EAST BEN WHITE BOULEVARD |
| AUSTIN, TEXAS 78741 |
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| SCOTT F. DIRING |
| 10333 RICHMOND, SUITE 1100 |
| HOUSTON, TX 77042 |
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