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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	8153926	Issue Dt:	04/10/2012	Application #:	12750877	Filing Dt:	03/31/2010
Publication #:	20100203737	Pub Dt:	08/12/2010
Inventors:	Yasuhiro MORIKAWA, Toshio HAYASHI, Koukou SUU
Title:	ETCHING METHOD AND SYSTEM

Assignment: 1

Reel/Frame:

027821/0184

Recorded: 03/07/2012

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

MORIKAWA, YASUHIRO

Exec Dt:

11/27/2006

HAYASHI, TOSHIO

Exec Dt:

11/27/2006

SUU, KOUKOU

Exec Dt:

11/27/2006

Assignee:

ULVAC, INC.

2500 HAGISONO

CHIGASAKI-SHI, KANAGAWA, JAPAN 410-1231

Correspondent:

STITES & HARBISON PLLC

400 WEST MARKET STREET

SUITE 1800

LOUISVILLE, KY 40202

Assignment: 2

Reel/Frame:

028018/0288

Recorded: 04/09/2012

Pages: 7

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE POSTAL CODE FOR ASSIGNEE PREVIOUSLY RECORDED ON REEL 027821 FRAME 0184. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT OF ASSIGNORS INTEREST.

Assignors:

MORIKAWA, YASUHIRO

Exec Dt:

11/27/2006