Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/10/2012
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Application #:
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11568949
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Filing Dt:
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11/10/2006
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Publication #:
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Pub Dt:
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10/25/2007
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Inventors:
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Uwe Graf, Lambert Danner
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Title:
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APPARATUS AND METHOD FOR INSPECTING MICRO-STRUCTURED DEVICES ON A SEMICONDUCTOR SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ERNST-LEITZ-STRASSE 17-37 |
| WETZLAR, GERMANY D-35578 |
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| MARIA ELISEEVA |
| 4 MILITIA DRIVE, SUITE 4 |
| LEXINGTON, MA 02421 |
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