Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/17/2012
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Application #:
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12279964
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Filing Dt:
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08/19/2008
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Publication #:
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Pub Dt:
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09/09/2010
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Inventors:
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Hiroyuki Miyata, Takeshi Miyazaki, Kazuhiko Kobayashi, Kunito Hayashi
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Title:
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ABERRATION EVALUATION PATTERN, ABERRATION EVALUATION METHOD, ABERRATION CORRECTION METHOD, ELECTRON BEAM DRAWING APPARATUS, ELECTRON MICROSCOPE, MASTER, STAMPER, RECORDING MEDIUM, AND STRUCTURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, NAKAMAGOME 1-CHOME, OHTA-KU |
| TOKYO, JAPAN 143-8555 |
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| 2-8, TOKURA 4-CHOME, KOKUBUNJI-SHI |
| TOKYO, JAPAN 185-0003 |
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| DICKSTEIN SHAPIRO, LLP |
| 1825 EYE STREET, NW |
| WASHINGTON, DC 20006 |
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