Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/24/2012
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Application #:
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12569194
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Filing Dt:
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09/29/2009
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Publication #:
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Pub Dt:
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04/15/2010
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Inventors:
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Akira ENDO, Yoshifumi Ueno, Youichi Sasaki, Osamu Wakabayashi
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Title:
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EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND METHOD OF GENERATING EXTREME ULTRAVIOLET LIGHT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400 YOKOKURASHINDEN, OYAMA-SHI |
| TOCHIGI 323-8558, JAPAN |
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| MCDERMOTT WILL & EMERY LLP |
| 600 13TH STREET, N.W. |
| WASHINGTON, D.C. 20005-3096 |
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