Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/12/2012
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Application #:
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12416809
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Filing Dt:
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04/01/2009
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Publication #:
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Pub Dt:
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10/07/2010
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Inventors:
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Takahiro Oka, Akira Shimizu
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Title:
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METHOD OF DEPOSITING SILICON OXIDE FILM BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION AT LOW TEMPERATURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6-CHOME |
| NAGAYAMA, TAMA-SHI |
| TOKYO, JAPAN 206-0025 |
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| DAMON L. BOYD/SNELL & WILMER |
| 400 EAST VAN BUREN |
| ONE ARIZONA CENTER |
| PHOENIX, AZ 85004-2202 |
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