Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/26/2012
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Application #:
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11987078
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Filing Dt:
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11/27/2007
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Publication #:
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Pub Dt:
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05/29/2008
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Inventors:
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Hideki Tateishi, Tsutomu Nakada, Akira Susaki, Shohei Shima, Yukio Fukunaga
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Title:
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APPARATUS AND METHOD FOR SURFACE TREATMENT OF SUBSTRATE, AND SUBSTRATE PROCESSING APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO |
| OHTA-KU, TOKYO, JAPAN |
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| WENDEROTH LIND & PONACK, LLP |
| ATTN: W. DOUGLAS HAHM, ESQ. |
| 2033 K STREET, NW |
| SUITE 800 |
| WASHINGTON, DC 20006-1021 |
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