Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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11686142
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Filing Dt:
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03/14/2007
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Publication #:
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Pub Dt:
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09/25/2008
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Inventors:
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Hsiao-Tzu Lu, Hung Chang Hsieh, Kuei Shun Chen, Hsueh-Hung Fu, Ching-Hua Hsieh et al
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Title:
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METHODS AND SYSTEMS FOR LITHOGRAPHY ALIGNMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN RD. 6 |
SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN 300-77 |
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HAYNES AND BOONE, LLP |
901 MAIN STREET, SUITE 3100 |
DALLAS, TX 75202-3789 |
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