Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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12196133
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Filing Dt:
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08/21/2008
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Publication #:
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Pub Dt:
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03/05/2009
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Inventors:
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Yuichi SHIBAZAKI, Yuho KANAYA
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Title:
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MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD FOR CONTINUOUS POSITION MEASUREMENT OF MOVABLE BODY BEFORE AND AFTER SWITCHING BETWEEN SENSOR HEADS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| MARIO A. COSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 320850 |
| ALEXANDRIA, VA 22320-4850 |
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