Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/21/2012
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Application #:
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10586187
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Filing Dt:
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07/31/2007
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Publication #:
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Pub Dt:
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11/22/2007
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Inventors:
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Toru Kimura, Yukio Nishimura, Tomohiro Utaka, Hiroaki Nemoto, Atsushi Nakamura et al
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Title:
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UPPER LAYER FILM FORMING COMPOSITION FOR LIQUID IMMERSION AND METHOD OF FORMING PHOTORESIST PATTERN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-6-10, TSUKIJI, CHUO-KU |
| TOKYO, JAPAN 104-8410 |
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| CHRISTOPHER W. RAIMUND |
| 901 FIFTEENTH STREET, NW, SUITE 850 |
| WASHINGTON, DC 20005 |
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