Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/21/2012
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Application #:
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12960357
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Filing Dt:
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12/03/2010
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Publication #:
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Pub Dt:
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05/24/2012
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Inventors:
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KUO-CHANG LIAO, WEIJUN SONG, DANG QUAN LIAO
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Title:
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METHOD AND RESULTING STRUCTURE FOR DEEP TRENCH POLYSILICON HARD MASK REMOVAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 18 ZHANG JIANG RD., PUDONG NEW AREA |
| SHANGHAI, CHINA 201203 |
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| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER |
| EIGHTH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 18 ZHANG JIANG RD., PUDONG NEW AREA |
| SHANGHAI, CHINA 201203 |
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| 18 WEN CHANG ROAD |
| ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, DAXING DISTRICT |
| BEIJING, CHINA 100176 |
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| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER |
| EIGHTH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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