Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/28/2012
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Application #:
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12423235
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Filing Dt:
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04/14/2009
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Publication #:
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Pub Dt:
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12/17/2009
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Inventors:
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Yohsuke Shibuya, Yasuyuki Shirai, Hirofumi Asanuma, Junji Nakamura
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Title:
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SUBSTRATE SUPPORT DEVICE AND PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-5-1, KURIGI, ASAO-KU |
| KAWASAKI-SHI, JAPAN 215-8550 |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 30 ROCKEFELLER PLAZA |
| 38TH FLOOR |
| NEW YORK, NY 10112 |
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