Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/28/2012
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Application #:
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12121410
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Filing Dt:
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05/15/2008
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Publication #:
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Pub Dt:
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11/19/2009
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Inventors:
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Ronghua Wei, Chris Rincon, Edward Langa
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Title:
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METHOD AND APPARATUS FOR HIGH RATE, UNIFORM PLASMA PROCESSING OF THREE-DIMENSIONAL OBJECTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6220 CULEBRA ROAD |
| SAN ANTONIO, TEXAS 78238-5166 |
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| BAKER BOTTS LLP |
| ANN LIVINGSTON (090936.0735) |
| 98 SAN JACINTO BLVD. SUITE 1500 |
| AUSTIN, TX 78701 |
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