Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/09/2012
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Application #:
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12241758
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Filing Dt:
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09/30/2008
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Inventors:
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Sunil Kapoor, Edward Augustyniak
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Title:
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CLOSED LOOP CONTROL SYSTEM FOR RF POWER BALANCING OF THE STATIONS IN A MULTI-STATION PROCESSING TOOL WITH SHARED RF SOURCE
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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WEAVER AUSTIN VILLENEUVE & SAMPSON LLP |
500 12TH STREET, SUITE 200 |
OAKLAND, CA 94607 |
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05/22/2024 03:03 AM
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