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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
8319944
Issue Dt:
11/27/2012
Application #:
12825001
Filing Dt:
06/28/2010
Publication #:
20100265478
Pub Dt:
10/21/2010
Inventors:
Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple et al
Title:
PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE INSTALLATION
Assignment: 1
Reel/Frame:
024606/0609Recorded: 06/29/2010Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BEIERL, HELMUT
Exec Dt:
06/13/2007
BLEIDISTEL, SASCHA
Exec Dt:
07/12/2007
SINGER, WOLFGANG
Exec Dt:
06/14/2007
GRUNER, TORALF
Exec Dt:
06/14/2007
EPPLE, ALEXANDER
Exec Dt:
06/14/2007
WABRA, NORBERT
Exec Dt:
07/02/2007
BEDER, SUSANNE
Exec Dt:
06/13/2007
WEBER, JOCHEN
Exec Dt:
06/21/2007
FELDMANN, HEIKO
Exec Dt:
06/25/2007
SCHWAER, BAERBEL
Exec Dt:
06/19/2007
ROGALSKY, OLAF
Exec Dt:
06/27/2007
KAZI, ARIF
Exec Dt:
06/13/2007
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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