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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
8366514
Issue Dt:
02/05/2013
Application #:
12748109
Filing Dt:
03/26/2010
Publication #:
20110165823
Pub Dt:
07/07/2011
Inventors:
Satoru IDE, Moriyuki Kashiwa, Kazuo Kobayashi, Noriyuki Motimaru, Eiichi Yamamoto et al
Title:
SEMICONDUCTOR SUBSTRATE PLANARIZATION APPARATUS AND PLANARIZATION METHOD
Assignment: 1
Reel/Frame:
024164/0745Recorded: 03/31/2010Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
IDE, SATORU
Exec Dt:
03/15/2010
KASHIWA, MORIYUKI
Exec Dt:
03/15/2010
KOBAYASHI, KAZUO
Exec Dt:
03/16/2010
MOTIMARU, NORIYUKI
Exec Dt:
03/16/2010
YAMAMOTO, EIICHI
Exec Dt:
03/16/2010
KUBO, TOMIO
Exec Dt:
03/08/2010
KIDA, HIROAKI
Exec Dt:
03/17/2010
Assignee:
OKAMOTO MACHINE TOOL WORKS, LTD.
2993 GOBARA
ANNAKA-CITY, GUNMA, JAPAN 379-0135
Correspondent:
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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