Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/16/2013
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Application #:
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12417787
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Filing Dt:
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04/03/2009
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Publication #:
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Pub Dt:
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12/24/2009
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Inventors:
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Matthias Schaller, Thomas Oszinda, Christin Bartsch, Daniel Fischer
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Title:
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METHOD AND SYSTEM FOR QUANTITATIVE INLINE MATERIAL CHARACTERIZATION IN SEMICONDUCTOR PRODUCTION PROCESSES BASED ON STRUCTURAL MEASUREMENTS AND RELATED MODELS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 EAST BEN WHITE BOULEVARD |
| AUSTIN, TEXAS 78741 |
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| J. MIKE AMERSON |
| 10333 RICHMOND, SUITE 1100 |
| HOUSTON, TX 77042 |
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