Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/16/2013
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Application #:
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12512677
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Filing Dt:
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07/30/2009
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Publication #:
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Pub Dt:
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02/03/2011
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Inventors:
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Hua Song, James P. Shiely, Qiaolin Zhang
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Title:
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MODELING THIN-FILM STACK TOPOGRAPHY EFFECT ON A PHOTOLITHOGRAPHY PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 700 E. MIDDLEFIELD ROAD |
| MOUNTAIN VIEW, CALIFORNIA 94043 |
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| EDWARD J. GRUNDLER |
| PARK, VAUGHAN & FLEMING, LLP |
| 2820 FIFTH STREET |
| DAVIS, CA 95618 |
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