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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/30/2013
Application #:
12177845
Filing Dt:
07/22/2008
Publication #:
Pub Dt:
01/28/2010
Inventor:
Yasuyuki Unno
Title:
DEVICE, METHOD, AND SYSTEM FOR MEASURING IMAGE PROFILES PRODUCED BY AN OPTICAL LITHOGRAPHY SYSTEM
Assignment: 1
Reel/Frame:
021275/0340Recorded: 07/22/2008Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
07/22/2008
Assignee:
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU
TOKYO, JAPAN
Correspondent:
FITZPATRICK, CELLA, HARPER & SCINTO
30 ROCKERFELLER PLAZA
NEW YORK, NY 10112-3800

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