Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2013
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Application #:
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12652410
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Filing Dt:
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01/05/2010
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Publication #:
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Pub Dt:
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02/17/2011
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Inventors:
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John T. FOURKAS, Erez H. Gershgoren, Linjie LI, Hana Hwang
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Title:
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METHOD AND SYSTEM FOR PHOTOLITHOGRAPHIC FABRICATION WITH RESOLUTION FAR BELOW THE DIFFRACTION LIMIT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 0133 COLE STUDENT ACTIVITIES BLDG. |
| OFFICE OF TECHNOLOGY COMMERCIALIZATION |
| COLLEGE PARK, MARYLAND 20742 |
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| FELICIA METZ |
| 0133 COLE STUDENT ACTIVITIES BLDG. |
| OFFICE OF TECHNOLOGY COMMERCIALIZATION |
| COLLEGE PARK, MD 20742 |
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