Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/18/2013
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Application #:
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12795014
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Filing Dt:
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06/07/2010
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Publication #:
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Pub Dt:
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10/21/2010
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Inventors:
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Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra et al
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Title:
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ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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