Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/25/2013
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Application #:
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12712515
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Filing Dt:
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02/25/2010
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Publication #:
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Pub Dt:
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08/25/2011
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Inventors:
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Po-Cheng SHIH, Kuan-Chen WANG, Chung-Chi KO, Keng-Chu LIN, Tai-Yen PENG, Wen-Kuo HSIEH et al
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Title:
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DOUBLE PATTERNING STRATEGY FOR CONTACT HOLE AND TRENCH IN PHOTOLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300 |
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| LOWE HAUPTMAN HAM & BERNER, LLP |
| 1700 DIAGONAL ROAD |
| SUITE 300 |
| ALEXANDRIA, VA 22314 |
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