Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/02/2013
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Application #:
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12839651
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Filing Dt:
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07/20/2010
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Publication #:
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Pub Dt:
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11/03/2011
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Inventors:
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Kiran V. Thadani, Jing Tang, Nitin Ingle, Dongqing Yang
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Title:
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HIGH-TEMPERATURE SELECTIVE DRY ETCH HAVING REDUCED POST-ETCH SOLID RESIDUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| WILLIAM L. SHAFFER |
| TOWNSEND AND TOWNSEND AND CREW LLP |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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