Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/23/2013
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Application #:
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13093351
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Filing Dt:
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04/25/2011
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Publication #:
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Pub Dt:
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10/25/2012
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Inventors:
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Bo Xie, Alexandros T. Demos, Kang Sub Yim, Thomas Nowak, Kelvin Chan
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Title:
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UV ASSISTED SILYLATION FOR RECOVERY AND PORE SEALING OF DAMAGED LOW K FILMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| B. TODD PATTERSON |
| PATTERSON & SHERIDAN, LLP |
| 3040 POST OAK BLVD, SUITE 1500 |
| HOUSTON, TX 77056 |
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