Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/23/2013
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Application #:
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12724721
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Filing Dt:
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03/16/2010
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Publication #:
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Pub Dt:
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09/22/2011
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Inventors:
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Yi Guo, Zhendong Liu, Guangyun Zhang, Kancharla-Arun Kumar Reddy
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Title:
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Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 451 BELLEVUE ROAD |
| NEWARK, DELAWARE 19713 |
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| PATRICIA CONNELL |
| 451 BELLEVUE ROAD |
| NEWARK, DE 19713 |
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