Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/23/2013
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Application #:
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13465108
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Filing Dt:
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05/07/2012
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Publication #:
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Pub Dt:
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08/30/2012
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Inventors:
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Yoshifumi UENO, Osamu WAKABAYASHI, Tamotsu ABE, Akira SUMITANI, Hideo HOSHINO, Akira ENDO et al
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Title:
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APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 400 YOKOKURA-SHINDEN |
| OYAMA-SHI.\\, TOCHIGI, JAPAN 323-8558 |
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| JAMES N. BAKER |
| 1420 K STREET, N.W. |
| 4TH FLOOR |
| WASHINGTON, DC 20005 |
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