Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/06/2013
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Application #:
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13069439
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Filing Dt:
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03/23/2011
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Publication #:
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Pub Dt:
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10/27/2011
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Inventors:
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Kazunori KUSABIRAKI, Takahiro Hayama, Kiyoshi Tanaka, Norihiko Sugie, Motoyuki Shima
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Title:
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UPPER LAYER-FORMING COMPOSITION AND RESIST PATTERNING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-9-2, HIGASHI-SHINBASHI, MINATO-KU |
| TOKYO, JAPAN 105-8640 |
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| MASAYASU MORI |
| 918 PRINCE STREET |
| ALEXANDRIA, VA 22314 |
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