Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/20/2013
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Application #:
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13620497
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Filing Dt:
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09/14/2012
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Publication #:
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Pub Dt:
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01/17/2013
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Inventors:
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Tadahiro OHMI, Kazuhide INO, Takahiro ARAKAWA
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 21, SAIIN MIZOSAKI-CHO, UKYO-KU |
| KYOTO-SHI, KYOTO, JAPAN 615-8585 |
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| 2-1-17-301, KOMEGAFUKURO, AOBA-KU |
| SENDAI-SHI, MIYAGI, JAPAN 980-0813 |
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| ARENT FOX LLP |
| 1717 K STREET, NW |
| WASHINGTON, DC 20036 |
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