Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/20/2013
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Application #:
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13223758
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Filing Dt:
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09/01/2011
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Publication #:
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Pub Dt:
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03/07/2013
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Inventors:
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Yan SHAO, Martin D. TABAT, Christopher K. OLSEN, Ruairidh MACCRIMMON
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Title:
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GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTAINING MATERIALS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 37 MANNING ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2545 W. FRYE RD. |
| SUITE 1 |
| CHANDLER, AZ 85224 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 3455 LYMAN BLVD. |
| CHASKA, MINNESOTA 55318 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD |
| AUSTIN, TX 78741 |
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