Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/27/2013
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Application #:
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12725821
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Filing Dt:
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03/17/2010
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Publication #:
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Pub Dt:
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09/30/2010
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Inventors:
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Fuminori Makino, Yasushi Koyanagawa, Ryuta Nakajima
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Title:
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XY STAGE DEVICE, SEMICONDUCTOR INSPECTION APPARATUS, AND SEMICONDUCTOR EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, OSAKI 2-CHOME |
| SHINAGAWA-KU |
| TOKYO, JAPAN 141-6025 |
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| SQUIRE SANDERS & DEMPSEY L.L.P. |
| 8000 TOWERS CRESCENT DRIVE, 14TH FLOOR |
| VIENNA, VIRGINIA 22182-6212 |
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