Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/03/2013
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Application #:
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12977762
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Filing Dt:
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12/23/2010
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Publication #:
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Pub Dt:
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04/21/2011
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Inventors:
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Daisuke Uenda, Yukio Arimitsu, Yoshio Terada, Yasuhiro Amano, Akihisa Murata
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Title:
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CLEANING SHEET, TRANSFER MEMBER PROVIDED WITH CLEANING FUNCTION, AND METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1-2, SHIMOHOZUMI, |
| IBARAKI-SHI, OSAKA, JAPAN 567-8680 |
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| WESTERMAN, HATTORI, DANIELS & ADRIAN LLP |
| 1250 CONNECTICUT AVENUE NW, |
| SUITE 700 |
| WASHINGTON,, DC 20036 |
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